500W DC 300W RF 2-target magnetron sputtering complex coating machine
| Min. Order: | 1 Set/Sets |
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| Trade Term: | FOB |
| Payment Terms: | Paypal, T/T, WU, Money Gram |
| Supply Ability: | 50 sets/month |
| Place of Origin: | Henan |
Company Profile
| Location: | Zhengzhou, Henan, China (Mainland) |
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| Business Type: | Manufacturer, Trading Company |
Product Detail
| Model No.: | CY-MSP300S-RFDC |
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| Means of Transport: | Air |
| Application: | thin film R&D |
| Chamber size: | φ300mm×300mm |
| Chamber material: | Stainless steel |
| Observation window: | φ100mm |
| Target diameter: | 2-inch*2 (1-inch,2-inch optional) |
| Sample stage: | φ185mm |
| Rotate speed: | 0-20 rpm adjustable |
| Ultimate vacuum: | 1.0E-5Pa |
| Pumping rate: | Molecular pump: 600L/S rotary vane pump: 1.1L/S |
| DC /RF power supply: | 500W 300W |
| Production Capacity: | 50 sets/month |
| Packing: | tandard export fumigation sign wooden box packaging |
| Delivery Date: | 30 days |
Product Description
Dual-target magnetron sputtering coater with RF&DC power supply CY-MSP300S-RFDC
Intro
Dual-target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable.
Structures
There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated.
The device is equipped with a 500W DC power supply and a 300W RF power supply. The DC power supply can be used for the preparation of metal film, and the RF power supply can be used for the preparation of non-metal. The two targets can meet the needs of multi-layer or multiple coatings.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements.
The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency.
This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.
Application
This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like.
Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory
Technical parameter
Sample stage | Size:φ185mm Temperature control accuracy:±1℃ Heating temperature:Max 500℃ Rotate speed:1-20rpm adjustable |
Magnetron Sputtering target head | 2-inch*2 (1-inch,2-inch optional) Water chiller:Circulating water chiller with flow rate of 10L/min |
Vacuum chamber | Chamber size:diameter 300mm×300mm Watch window:diameter 100mm Chamber material:Stainless steel Opening mode:Top cover open |
Mass flowmeter | 2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs) |
Vacuum system | Model:CY-GZK103-A Pumping interface:KF40 Molecular pump:CY-600 Exhaust interface:KF16 Backing pump:rotary vane pump Vacuum measurement:Compound vacuum gauge Ultimate vacuum:1.0E-5Pa Power supply:AC;220V 50/60Hz Pumping rate:Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes |
Power configuration | DC power supply×1,RF power supply×1 Max output power:DC 500W, RF 300 W |
Other parameters | Supply voltage:AC220V,50Hz Overall size:600mm*650mm*1280mm Total power:2.5KW Total Weight::About 300kg |
Detail pictures
