Bath Type ITO Film Magnetron Sputtering Coating Machine / Glass ITO Deposition Machine
| Place of Origin: | Guangdong |
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Company Profile
| Location: | Shanghai, China (Mainland) |
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| Business Type: | Manufacturer |
| Main Products: | PVD Plating, Ion Plating Machine, PVD Coating Machine |
Product Detail
| Model No.: | AIA-1 |
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Product Description
ITO Film Coating Machine, Bath Type ITO film Magnetron Sputtering Coater; Glass ITO Deposition Machine
Standard applications: PET, glass, to generate ITO coating layers.
Machine Built Time: 2012, China.
Application: AR film, ITO film.
Work Pieces:
Size: 300mm*100mm
Thickness of PET: 0.175mm+/-0.05mm
*Thickness of ITO Film:185nm+/-5nm
Sheet resistance: 6~8ohm/sq
Technical Configurations:
1) DC Sputtering Sources: Cu, Al, ITO
2) MF Sputtering Sources
3) Turbo Molecular pump + Backing Pump group
4) High-intensity magnetic field to improve ITO film quality, target utilization rate >30%
5) Cu, Al, Si targets utilization rate > 35%
6) Deposition Rate: 30nm m/min ~ 40nm m/min
7) Sputtering Uniformity Area: 350mm
VAKIA FOCUS ON DETAILS
VAKIA-MSC Standard Specifications
| Model | Size(mm) |
Substrate Jigs (Qty.) |
Sputtering Power(kVA) |
Sputtering Targets (Qty.) |
Sputtering Cathode |
MFC | Remark |
| MSC800 | Φ800xH800 | 1 | 2*50 DC | 4 | Cylinder | 3 | ITO coating |
| MSC1616 | Φ1600xH1600 | 6,8 | 2*36 DC | 2 | Rectangular | 2 | 2-door |
Coating Samples
Please contact us for more information, Vakia Vacuum Coating is honored to be your your business partner.