Cr 39 Anti Reflection Coating Machine / Transparency Enhanced Film Ar Coating Machine

Place of Origin:	Guangdong

Company Profile

SHANGHAI VAKIA COATING TECHNOLOGY CO.,LTD.

Location:	Shanghai, China (Mainland)
Business Type:	Manufacturer
Main Products:	PVD Plating, Ion Plating Machine, PVD Coating Machine

Product Detail

Model No.:	AIA-1

Product Description

cr 39 anti reflection coating machine / cr 39 AR / Ar coating machine

General Information

Introduction: This machine is mainly used for plating various films such as transparency enhanced film, spectroscopic film, band pass film/cutoff film, and high reflection film. It can plate a super large film system with 100 lays of film, and a transparency enhanced film with various colors, a reflection film with a red, yellow, blue, green or rainbow color

Main Features:

1. This machine is equipped with a super big crucible electronic gun. In the entire evaporation process the film surface is flat and evaporation distribution is even.

2. This machine is equipped with a quartz crystal film thickness control instrument to control the film forming speed and metallization process automatically.

3. This machine is equipped with a high power ion source to produce a film thickness with good quality.

4. The overall structure is rationally designed to better satisfy the process requirements. The vacuum system is automatically controlled by PLC for convenient operation.

5. The vacuum operating system is protected with an interlock. The diffusion pump has water cutoff and phase loss alarm functions.

6. Touch screen and PLC automatic control are used to set parameters of main components of the entire machine, to monitor the running of this machine at real time, and to diagnose faults intelligently.

Main Configuration:

1. The vacuum chamber is a vertical type boxed structure with a front door; the box is completely made of stainless steel

2. Vacuum System Configuration: with molecular pump(or diffusion pump), Roots pump, mechanical pumps.

3. Deep Cooling System with a Fast Cycle Water Vapor Cryopump

4. Work Piece Rack is an integrated arched shape work piece, can be customized according to the customer.

5. Coating system is equipped with one or two sets of high power e-type 270°magnetic deflection electronic gun scanning in XY directions. The auxiliary metallization system is equipped with a Holl ion source.

6. Baking: Digitally displayed and automatically controlled with a temperature control precision of ±1.5.

7. The film thickness monitoring system can control evaporation rate of the electronic gun. The optical film thickness monitoring system, in which the wave length is controlled within the range of 200-900nm .

8. Control System: The vacuum is controlled by a 10.4 inches color touch screen coupled with a programmable logic controller. The vacuum and coating process are controlled fully automatically.

Tag Keywords

cr 39 anti reflection , coating machine , cr 39 , AR coating machine , ar coating machine / equipment

Parameters :

model		OEC630	OEC900	OEC1100	OEC1200	OEC1350	OEC1600
application		Plating system for multilayer film, antireflection film, filters and beam splitting film, 7 colour film, cold light film, reflective film, etc.
Principal dimension	Inside the chamber	φ630×800	φ900×1100	φ1100×1300	φ1200×1450	φ1350×1500	φ1600×1500
	Substrate umbrella stand	φ570	φ820	Φ1000	φ1100	φ1250	φ1500
Umbrella stand rotary speed		0~30r/min,continuously adjustable
Major parameter	Vacuumizing speed	From one bar to 5.0×10-3Pa12 minutes(no-load)
	Ultimate vacuum	3.0×10-4Pa
	Substrate temperature	350°C(maximum)
Exhaust system	Exhaust vacuum pumps	KT400 oil diffusion pump system	KT600 oil diffusion pump system	KT800 oil diffusion pump system	KT600 oil diffusion pump system	KT800 oil diffusion pump system	KT800 oil diffusion pump system
	Cryogenic trap	Selective assembly
Heating system	Heating method	Up heating mode,heating plate adjust the heating power regional ,PID control
	Heating power	6KW	6KW	12KW	12KW	24KW	48KW
Crystalline diaphragm thickness gauge		SQC-310(or XTC-3)
Vacuum gauge		thermocouple+thermionic cathode (Domestic)
flowmeter		Yamatake
Ion source		Domestic ion source
Electronic gun		Domestic electronic gun
Resistance type evaporation		Three electrode double group, electrode with water

Coating Samples

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