Laboratory compact sliding horizontal CVD tube furnace with digital gauge and vacuum pump
| Min. Order: | 1 Set/Sets |
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| Trade Term: | FCA |
| Payment Terms: | L/C, D/A, T/T |
| Supply Ability: | 50 |
| Place of Origin: | Henan |
Company Profile
| Location: | Zhengzhou, Henan, China (Mainland) |
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| Business Type: | Manufacturer |
| Main Products: | Tube Furnace |
Product Detail
| Model No.: | CY-O1200-60IT |
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| Means of Transport: | Ocean |
| Brand Name: | CY |
| Production Capacity: | 50 |
| Packing: | PLY wood box, or as customer request |
| Delivery Date: | within 7 days |
Product Description
Furnace parameters
| Furnace Construction | •High purity ceramic fiber insulation (energy saving 30% and weight lighter about 30% than old furnace ). surface of furnace below 50 °C. |
Chamber Size | Φ50*1000mm, Φ60*1000mm,Φ80*1000mm,Φ100*1000mm or as customized | |
Power | 0.8KW ~10KW, base on the heating zone length | |
Voltage | AC 110V or AC 220V 50/60 Hz (please tell us when your place order.) | |
Max. Temperature | 1200 °C (< 2 hour) | |
Continuous Work Temp. | 1150 °C | |
Max. Heating Rate | 20 °C /min | |
Temperature Controller | • PID automatic control and auto-tune function. | |
Temperature Accuracy | +/- 1 °C | |
Heating Element | Aludirome | |
Thermal Couple | K type | |
Plasma RF generator | l Output Power: 5 -300W adjustable with ±1% stability l RF frequency: 13.56 MHz 0.005% stability l Reflection Power: 200W max. l Matching: Automatic l RF Output Port: 50 Ω, N-type, female l Noise: <50 dB. l Cooling: Air cooling. (water cooling is available upon request, and a water chiller can be ordered seperately) l Power : 208-240VAC, 50/60Hz
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Vacuum Pump | l AC 220V 50 Hz 1/2HP 375W l 2 Liter /S or 120 liter/m l Oil trap (inlet) and exhaust filter (outlet) are installed. l Max. vacuum: 10-2 torr l Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr. | |