Vacuum tube coating line

Place of Origin:	Zhejiang

Main characteristics of solar vacuum tube of full automatic coating machine:
1.Using touch screen, PLC technology, intelligent control;
2.It makes all the changing factors that influence the coating film quality under quantification control, which makes better controlling and quality more stability.
3.Though survey the coating craftwork, two sets of the most popular production craftwork nowadays in our vacuum production is depurating single target craftwork in Qinghua, its characteristics are simple craftwork, low cost, and high efficiency. The other is Australian three targets craftwork which imported by the professor in Beijing University (stainless steel target, copper target, and aluminum target.), its characteristics are complex, long time, much lower efficiency, while the advantage is high absorptions, 95, it is the ideal choose in producing high temperature vacuum tubes.
Therefore, according to the characteristics of two craftworks, we produce comprehensive equipment that can be used arbitrarilySCS-850Z three targets equipment, when using single target, choose different rotating work frame.
Coating:Φ37×(1200-1800)mm vacuum tube 40 braches/kiln, about 1900 branches everyday productivity;
Coating:Φ47×(1500-2000)mm vacuum tube 34 branches/kiln , about 1600 branches everyday productivity ;
Coating:Φ58×(1500-2000)mm vacuum tube 29 branches/kiln , about 1300 branches everyday productivity ;
4.New machine equipment is designed in the installation of target and disassembly, which helps one person to install and take down target convenience.
5.It remains the advantages and new improvements of coating machine, the specific introductions are following:
(1)We develop and design a practical new patent, the patent application number is: 02277300.2,new type cylindrical magnetron rotating target, the diameter of the target is Φ95, more equality sputtering ,more availability and efficiency of the target.
(2)Change the Oil diffusing pump K-500 to K-650, and allocate two units of 2X-70machine pump, and keeping pump which achieve fast pumping speed and high efficiency.
(3)We design stove temperature auto control system in diffusing pump, which saves power energy, improves pumping speed, increases the service life of stove wire, and adds phase failure sound and light alarm of stove wire of diffusing pump;
(4)New type adds water pressure light alarm, the water target back way adds water switch: it can not start if it has only water pressure but no current, which protect the target much better.
(5)Target power supply has the following functions: soft startup, automatic protection when operation current is over, automatic constant current, turn off the AC power automatically when craftwork is finished.
(6)Excellent Repeatability of the new designed diaphragm valve.

Main specification
Type SWHZ01 put the electricity-control cabinet at the right side of machine or convenience places.2400×1200×2750
Type SWHZ01 vertical, round and front- door structure
Inner size: Φ850×2000,Φ850×2450, arbitrary selection
Valve: solenoid pneumatic operation
Characteristics: fast pumping speed, high efficiency, it needs only 5 min from air to the bottom of sputtering pressure, automatic stove temperature control, phase failure sound and light alarm of stove wire; duplex of water pressure and current, sound and light alarm.
Type SWHZ01 main pump: K-650 oil diffusing pump, stainless steel pump core;
Backing pump: 2X-70 rotary vane mechanical pump.
Keeping pump: 2X-15 rotary vane pump.
Valve: solenoid pneumatic power
Characteristics: the same as above. In addition, it has the target and diffusing pump to effluent and digital monitor temperature display.
Pump-down time: from atmosphere to 6.7×10-pa≤15min
Revolution: 0.3~1.5r/min
Rotation: 5~23r/min
Size of work-piece for coating: Φ37×(1200-1800) 32 branches per chamber, about 1600 vacuum tubes everyday productivity,47×(1500-2000)
Type SWHZ01 rotary work frame and target are two separate sets of DC motor stepless speed regulation;
Size of work-piece for coating: Φ37×(1200-1800) 40 branches per stove, productivity is about 1900 vacuum tubes
Φ47×(1500-2000) 34 branches per stove, about 1600 vacuum tubes everyday productivity.
Φ58×(1500-2000) 29 branches per stove, everyday productivity is about 1300 vacuum tubes