parameters type | 700 | 800 | 900 | 1000 |
dimension of vacuum chamber | 700×1000 | 800×1000 | 900×1000 | 1000×1000 |
pumping speed | 1×105Pa~3×10-3Pa≤20min |
limit vacuum | ≤1×10-3Pa |
system form a complete set | KT-400/2X-70 2X-15 | KT-400/2X-70 2X-15 | KT-500/2X-70 2X-15/ZLD-300 | KT-500/2X-70 2X-15/ZLD-300 |
workpiece system | Rotation of the planet forms(8 roating shaft, since the amount) |
heating methods | Edge installation of stainless steel heating tube |
ion bombardment | direct current 1000V or contravariant impulse 1000V high voltage bombardment |
vent system | Mass flow controller control input gas |
Filament device | Device equipped with filament assisted deposition |
magnetron target amount | 2 | 2 | 2,4 | 2,4 |
Sputtering power | one intermediate frequency power supply | one or two intermediate frequency power supply |
working methods | plc semi-auto control or pc+plc auto control |
working gas | Ar N2 O2C2H2 |
total power | 30KW | 35KW | 45KW | 50KW |
compress air | 0.4~0.8MPa |
water-cooling system | hydraulic pressure/water temperature:≤25°C/≥0.25MPa(user provide for himself |